Drop Shape Analyzer – DSA100W – Krüss

Advanced Wafer Surface Analysis for Quality Control

The DSA100W Drop Shape Analyzer by Krüss is engineered for the automated quality control of wafer surfaces and other round samples, focusing on the standardized assessment of surface cleanliness and coating effectiveness. Utilizing contact angle measurement, the instrument evaluates surface cleaning homogeneity and differentiates coating characteristics, especially in distinguishing the wetting properties of exposed versus unexposed photo varnish.

Applications

Specially designed for the semiconductor and microelectronics industries, the DSA100W serves multiple applications. It’s ideal for evaluating the cleaning and coating uniformity on wafers, assessing adhesion between wafers and coatings, and investigating the wetting of photo varnishes, both exposed and unexposed. Moreover, its application extends to analyzing round samples like hard drives and brake disks, making it a versatile tool for surface analysis.

Measuring Techniques and Benefits

The heart of the DSA100W lies in its software-controlled setup featuring a rotating sample table that ensures quick and accurate contact angle measurements across any wafer position. This precision is further bolstered by a controlled dosing system that reduces pre-wetting measurement deviations. With the integration of ADVANCE software, the instrument automates the measurement process, enabling high throughput with standardized procedures. High imaging quality, achieved through a high-resolution camera and quality zoom lens, guarantees reliable drop shape analysis for exact contact angle measurements.

Technical Specifications

Dosing System
  • Syringe Dosing: 1 × software-controlled
  • Liquid Needle double pressure dosing: optional
  • Drop deposition (syringe dosing): software-controlled
  • Syringes, volume: glass (1 × 450 μL), disposable (900 μL)
  • Resolution (syringe dosing): 20 nL
  • Speed (syringe dosing): 0.004 to 25 μL/s
Camera system (standard)
  • Model: Camera CF04
  • Connection: USB 3.0
  • Resolution: 1920 × 1200 px
  • Frame rate: 2300 fps
  • Dark noise: 7 electrons
  • Dynamic range: 73 dB
Optics (standard)
  • Focus: manual
  • Zoom: 7× zoom, manual
  • View angle: ±4°
  • Field of view: CF04: 3.9 mm × 3.9 mm to 24.7 mm × 24.7 mm
  • Resolution of optics: CF04: 3.1 to 21.7 μm
Illumination
  • Types: high power monochromatic LED
  • Wave length, dominant: 470 nm
  • Field of light: 46 mm × 46 mm (D × H)
Stages
  • Control: y-axis: software-controlledz-axis: manual z-axis (optional): software-controlledrotation axis: software-controlled
  • Range: y-axis: 170 mmz-axis manual: 45 mmz-axis software-controlled (optional): 38 mmrotation axis: 360°
  • Resolution: y-axis: 10 μmz-axis manual: 16 mm/turnz-axis software-controlled (optional): 10 μmrotation axis: 0.1°
  • Accuracy: y-axis: 100 μmz-axis manual: -z-axis software-controlled (optional): 100 μmrotation axis: 1°
Liquid Needle pressure dosing system
  • Included in setup: optional
  • Types: double
  • Control: software-controlled
  • Cartridge, volume: disposable (1 mL)
  • Resolution: 0.1 μL
  • Speed: fixed (fast jet)
Camera system (optional)
  • Model: 5 megapixel high speed camera CF10
  • Connection: USB 3.0
  • Resolution: 2592 × 2048 px
  • Frame rate: 3450 fps
  • Dark noise: 9.3 electrons
  • Dynamic range: 60 dB
Optics (optional)
  • Focus: manual
  • Zoom: 7× zoom, manual
  • View angle: ±4°
  • Field of view: CF10: 7.1 mm × 5.6 mm to 49.8 mm × 39.4 mm
  • Resolution of optics: CF10: 2.7 to 19.2 μm
Tilting (optional)
  • Types: external tilting table
  • Control: software-controlled
  • Range: 0 to 90°
  • Resolution: 0.1°
  • Accuracy: 1°
Software
  • Software type: ADVANCE
  • Software languages: Chinese (simplified), English, French, German, Japanese, Korean, Portuguese, Russian, Spanish
  • Software modules: Contact angle (recommended)Surface free energy of solids (recommended)Interfacial and surface tension of liquids: - pendant drop, rising drop (optional)- Contrained Sessile Drop (optional)Adhesion Analysis (optional)Remote Control API (optional)
Sessile drop
  • Results: contact angle
  • Range: 0 to 180° (software-based)
  • Resolution: 0.01° (software-based)
  • Accuracy: 0.1° (instrument-based)
  • Models: conic sectionpolynomialcircleYoung-Laplaceheight-width
  • Types: advancingrecedingstaticdynamictilting
Surface free energy of solids
  • Results: surface free energypolar & disperse partacid & base partH-bond part
  • Models: equation of stateZismanFowkesWuOwens-Wendt-Rabel-KaelbleSchultz-1extended Fowkesacid-base theory
Captive bubble
  • Results: contact angle
  • Range: 0 to 180° (software-based)
  • Resolution: 0.01° (software-based)
  • Accuracy: 0.1° (instrument-based)
  • Models: conic sectionpolynomialcircleYoung-Laplaceheight-width
  • Types: advancingrecedingstaticdynamictilting
Pendant drop/rising drop
  • Results: surface tensioninterfacial tension
  • Range: 0.01 to 2000 mN/m (software-based)
  • Resolution: 0.01 mN/m (software-based)
  • Models: Young-Laplace
  • Types: staticdynamic
Constrained Sessile Drop
  • Results: surface tension
  • Range: 0.01 to 2000 mN/m (software-based)
  • Resolution: 0.01 mN/m (software-based)
  • Models: Young-Laplace
Sample dimensions
  • Maximum sample space: 320 mm × ∞ × 275 mm (W × D × H (without axes))
Instrument dimensions
  • Footprint: 555 mm × 375 mm (W × D)
  • Height: 490 mm
  • Weight (without accessories): 24 kg
Environment
  • Operating temperature: 10 to 40 °C
  • Humidity: without condensation
Interfaces
  • PC: USB 3.0
Housing and peripherals
  • Compartment: test liquids protected against light
  • Needle protection shield: yes
  • Camera und optics housing: yes
  • Levelling: yes
Power supply
  • Voltage: 88 to 264 V
  • Power consumption: 100 W
  • Frequency: 50 to 60 Hz
Temperature measurement
  • Range: -50 to 400 °C
  • Resolution: 0.1 °C
  • Precision: ±0.1 °C
  • Accuracy: 1/3 DIN B (±0.1 °C at 0 °C to ±0.8 °C at 400 °C)
  • Locations: environment air
  • External sensor: 2 connectors (PT100)

FAQ - Drop Shape Analyzer – DSA100W – Krüss

What are the primary applications of the DSA100W Drop Shape Analyzer?

The DSA100W is specifically designed for the semiconductor and microelectronics industries for automated quality control of wafer surfaces. It assesses surface cleanliness, coating uniformity, adhesion of coatings to wafers, and the wetting properties of photo varnishes. Additionally, it can be applied to round samples like hard drives and brake disks.

What makes the DSA100W ideal for evaluating surface treatments on wafers?

This instrument features a software-controlled setup with a rotating sample table for precise contact angle measurements, a controlled dosing system to minimize measurement deviations, and high-quality imaging for reliable analysis. Its specialized ADVANCE software automates the measurement process, facilitating high throughput and consistent procedures.

Can the DSA100W distinguish between different coating characteristics?

Yes, the DSA100W excels in differentiating coating characteristics by evaluating the wetting properties of exposed versus unexposed photo varnish, among other assessments. This capability is crucial for ensuring the effectiveness of surface treatments.

What are the specifications of the camera and dosing systems in the DSA100W?

The standard camera system features a CF04 model with a 1920 × 1200 px resolution and a syringe dosing system that is software-controlled, offering 20 nL resolution for precise liquid handling. Optional enhancements include a high-speed CF10 camera and a liquid needle double pressure dosing system for advanced applications.

Is the DSA100W capable of temperature-dependent measurements?

Yes, it features a temperature measurement range from -50 to 400 °C with high precision and accuracy, supported by two connectors for external sensors. This allows the analysis of surface properties under various temperature conditions.

How does the software support the operation of the DSA100W?

The ADVANCE software provides a user-friendly interface in multiple languages, and is equipped with modules for a wide range of measurements, including contact angle, surface free energy, and interfacial tension. Optional modules such as adhesion analysis and remote control API further extend its capabilities.

What are the environmental requirements for the DSA100W operation?

The instrument should be operated in conditions ranging from 10 to 40 °C with no condensation. These parameters ensure the integrity of the surface analysis, maintaining high accuracy and reliability of results.

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